When doing some UEFI deployments to tablets recently I was seeing OSDDiskPart errors when it tried to partition the disc for UEFI, the error read
OsdDiskPart.exe – Application Error. . The instruction at 0x584c8374 referenced memory at 0x000005c0. The memory could not be read.
It seems the error is related to the way MDT’s template partitions UEFI discs and this is explained in Johan’s blog below (thanks Johan).
Deploying UEFI machines with ConfigMgr 2012 R2